<entry id="3727917" version="1.6" xmlns="http://www.wadoku.de/xml/entry"><form><orth midashigo="true">原子層エピタキシー</orth><orth>原子層エピタキシー</orth><orth type="long">原子層エピタキシー</orth><reading><hira>げんしそうえぴたきしー</hira><hatsuon>&lt;げん'し&gt;･そう･えぴたきしー</hatsuon><accent>8</accent></reading></form><gramGrp><meishi/></gramGrp><sense><usg type="dom">Phys.</usg><usg type="dom">Elektrot.</usg><trans><tr><token genus="f" type="N">Atomlagenepitaxie</token></tr></trans><trans><tr><token genus="f" type="N">Atomschichtepitaxie</token></tr></trans></sense><ref id="5174864" type="main" subentrytype="head"/></entry>